Granted Patent
Utility
US 4,833,621 · App. 07/056,955
Method of and apparatus for aligning a substrate
Inventor:
Toshikazu Umatate
Patented Case
View Patent ↗
Granted: May 23, 1989
Filed: Jun 3, 1987
Inventor
Toshikazu Umatate
Assignee (at issue)
NIKON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.