IP Library Granted Patent US 4,834,020
Granted Patent Utility
US 4,834,020 · App. 07/128,806

Atmospheric pressure chemical vapor deposition apparatus

Inventors: Lawrence D. Bartholomew, Nicholas Gralenski, Michael A. Richie, Michael L. Hersh
Patented Case View Patent ↗
Granted: May 30, 1989 Filed: Dec 4, 1987
Inventors
Lawrence D. Bartholomew
Nicholas Gralenski
Michael A. Richie
Michael L. Hersh
Assignee (at issue)
Watkins-Johnson Company, Inc.

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Quick Facts
Patent No.
US 4,834,020
App. No.
07/128,806
Filed
1987-12-04
Granted
1989-05-30
Kind
A