Granted Patent
Utility
US 4,834,022 · App. 07/114,326
CVD reactor and gas injection system
Inventor:
Imad Mahawili
Patented Case
View Patent ↗
Granted: May 30, 1989
Filed: Oct 27, 1987
Inventor
Imad Mahawili
Assignee (at issue)
Focus Semiconductor Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.