IP Library › Granted Patent US 4,835,704
Granted Patent Utility
US 4,835,704 · App. 06/947,461

Adaptive lithography system to provide high density interconnect

Inventors: Charles W. Eichelberger, Robert J. Wojnarowski, Kenneth Brakeley Welles, II
Patented Case View Patent ↗
Granted: May 30, 1989 Filed: Dec 29, 1986
Inventors
Charles W. Eichelberger
Robert J. Wojnarowski
Kenneth Brakeley Welles, II
Assignee (at issue)
General Electric Company

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Quick Facts
Patent No.
US 4,835,704
App. No.
06/947,461
Filed
1986-12-29
Granted
1989-05-30
Kind
A