Granted Patent
Utility
US 4,836,138 · App. 07/063,409
Heating system for reaction chamber of chemical vapor deposition equipment
Inventors:
McDonald Robinson, Albert E. Ozias
Patented Case
View Patent ↗
Granted: Jun 6, 1989
Filed: Jun 18, 1987
Inventors
McDonald Robinson
Albert E. Ozias
Assignee (at issue)
Epsilon Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.