IP Library Granted Patent US 4,836,233
Granted Patent Utility
US 4,836,233 · App. 07/203,009

Method and apparatus for venting vacuum processing equipment

Inventor: Robert W. Milgate, III
Patented Case View Patent ↗
Granted: Jun 6, 1989 Filed: Jun 6, 1988
Inventor
Robert W. Milgate, III
Assignee (at issue)
Eclipse Ion Technology, Inc.

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Quick Facts
Patent No.
US 4,836,233
App. No.
07/203,009
Filed
1988-06-06
Granted
1989-06-06
Kind
A