Granted Patent
Utility
US 4,836,733 · App. 07/135,568
Wafer transfer system
Inventors:
Richard J. Hertel, Adrian Delforge, Eric L. Mears, Edward D. MacIntosh, Robert E. Jennings, Akhil Bhargava
Patented Case
View Patent ↗
Granted: Jun 6, 1989
Filed: Dec 21, 1987
Inventors
Richard J. Hertel
Adrian Delforge
Eric L. Mears
Edward D. MacIntosh
Robert E. Jennings
Akhil Bhargava
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.