IP Library › Granted Patent US 4,840,487
Granted Patent Utility
US 4,840,487 · App. 06/875,980

Measuring apparatus for etching pits

Inventors: Minori Noguchi, Toru Otsubo, Susumu Aiuchi
Patented Case View Patent ↗
Granted: Jun 20, 1989 Filed: Jun 19, 1986
Inventors
Minori Noguchi
Toru Otsubo
Susumu Aiuchi
Assignee (at issue)
HITACHI, LTD.

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Quick Facts
Patent No.
US 4,840,487
App. No.
06/875,980
Filed
1986-06-19
Granted
1989-06-20
Kind
A