IP Library Granted Patent US 4,840,701
Granted Patent Utility
US 4,840,701 · App. 07/210,333

Etching apparatus and method

Inventor: Ronald C. Stern
Patented Case View Patent ↗
Granted: Jun 20, 1989 Filed: Jun 23, 1988
Inventor
Ronald C. Stern
Assignee (at issue)
STC PLC

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Quick Facts
Patent No.
US 4,840,701
App. No.
07/210,333
Filed
1988-06-23
Granted
1989-06-20
Kind
A