Granted Patent
Utility
US 4,842,677 · App. 07/224,416
Excimer laser patterning of a novel resist using masked and maskless process steps
Inventors:
Robert J. Wojnarowski, Charles W. Eichelberger
Patented Case
View Patent ↗
Granted: Jun 27, 1989
Filed: Jul 26, 1988
Inventors
Robert J. Wojnarowski
Charles W. Eichelberger
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.