Granted Patent
Utility
US 4,846,102 · App. 07/065,945
Reaction chambers for CVD systems
Inventor:
Albert E. Ozias
Patented Case
View Patent ↗
Granted: Jul 11, 1989
Filed: Jun 24, 1987
Inventor
Albert E. Ozias
Assignee (at issue)
Epsilon Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.