IP Library › Granted Patent US 4,847,111
Granted Patent Utility
US 4,847,111 · App. 07/213,861

Plasma-nitridated self-aligned tungsten system for VLSI interconnections

Inventors: Yu C. Chow, Kuan-Yang Liao, Maw-Rong Chin
Patented Case View Patent ↗
Granted: Jul 11, 1989 Filed: Jun 30, 1988
Inventors
Yu C. Chow
Kuan-Yang Liao
Maw-Rong Chin
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,847,111
App. No.
07/213,861
Filed
1988-06-30
Granted
1989-07-11
Kind
A