Granted Patent
Utility
US 4,849,087 · App. 07/155,153
Apparatus for obtaining transverse uniformity during thin film deposition on extended substrate
Inventor:
Stephen F. Meyer
Patented Case
View Patent ↗
Granted: Jul 18, 1989
Filed: Feb 11, 1988
Inventor
Stephen F. Meyer
Assignee (at issue)
Southwall Technologies Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.