IP Library › Granted Patent US 4,849,377
Granted Patent Utility
US 4,849,377 · App. 06/866,648

Active area planarization with self-aligned contacts

Inventors: Manjin J. Kim, Bruce F. Griffing, Ronald H. Wilson, Arlene G. Williams, Robert W. Stoll
Patented Case View Patent ↗
Granted: Jul 18, 1989 Filed: May 27, 1986
Inventors
Manjin J. Kim
Bruce F. Griffing
Ronald H. Wilson
Arlene G. Williams
Robert W. Stoll
Assignee (at issue)
General Electric Company

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Quick Facts
Patent No.
US 4,849,377
App. No.
06/866,648
Filed
1986-05-27
Granted
1989-07-18
Kind
A