Granted Patent
Utility
US 4,851,263 · App. 07/111,540
Method and apparatus for application of wax on wafers
Inventors:
Keiichi Ishii, Yukio Tsutsumi, Kazunori Saeki, Mitsuji Koyama
Patented Case
View Patent ↗
Granted: Jul 25, 1989
Filed: Oct 23, 1987
Inventors
Keiichi Ishii
Yukio Tsutsumi
Kazunori Saeki
Mitsuji Koyama
Assignees (at issue)
Mitsubishi Kinzoku Kabushiki Kaisha
Japan Silicon Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.