Granted Patent
Utility
US 4,851,693 · App. 07/202,748
Compensated scan wave form generator for ion implantation equipment
Inventor:
Peter Fisher
Patented Case
View Patent ↗
Granted: Jul 25, 1989
Filed: Jun 3, 1988
Inventor
Peter Fisher
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.