Granted Patent
Utility
US 4,852,516 · App. 07/091,651
Modular processing apparatus for processing semiconductor wafers
Inventors:
Richard Rubin, Benjamin J. Petrone, Richard C. Heim, Scott M. Pawenski
Patented Case
View Patent ↗
Granted: Aug 1, 1989
Filed: Sep 1, 1987
Inventors
Richard Rubin
Benjamin J. Petrone
Richard C. Heim
Scott M. Pawenski
Assignee (at issue)
Vaccine Technology Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.