Granted Patent
Utility
US 4,853,669 · App. 07/174,821
Sealed cavity semiconductor pressure transducers and method of producing the same
Inventors:
Henry Guckel, David William Burns
Patented Case
View Patent ↗
Granted: Aug 1, 1989
Filed: Mar 29, 1988
Inventors
Henry Guckel
David William Burns
Assignee (at issue)
Wisconsin Alumni Research Foundation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.