Granted Patent
Utility
US 4,854,337 · App. 07/197,867
Apparatus for treating wafers utilizing megasonic energy
Inventors:
Joachim Bunkenburg, Peter Hammond
Patented Case
View Patent ↗
Granted: Aug 8, 1989
Filed: May 24, 1988
Inventors
Joachim Bunkenburg
Peter Hammond
Assignee (at issue)
EASTMAN KODAK COMPANY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.