IP Library Granted Patent US 4,855,247
Granted Patent Utility
US 4,855,247 · App. 07/291,541

Process for fabricating self-aligned silicide lightly doped drain MOS devices

Inventors: Di Ma, David H. Hoffman
Patented Case View Patent ↗
Granted: Aug 8, 1989 Filed: Dec 29, 1988
Inventors
Di Ma
David H. Hoffman
Assignee (at issue)
STANDARD MICROSYSTEMS CORPORATION

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Quick Facts
Patent No.
US 4,855,247
App. No.
07/291,541
Filed
1988-12-29
Granted
1989-08-08
Kind
A