Granted Patent
Utility
US 4,855,604 · App. 06/947,914
Ion beam implant system
Inventor:
Shantia Riahi
Patented Case
View Patent ↗
Granted: Aug 8, 1989
Filed: Mar 17, 1987
Inventor
Shantia Riahi
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.