Granted Patent
Utility
US 4,859,573 · App. 07/089,014
Multiple photoresist layer process using selective hardening
Inventors:
George Maheras, Hubert O. Hayworth, Michael R. Gulett
Patented Case
View Patent ↗
Granted: Aug 22, 1989
Filed: Aug 21, 1987
Inventors
George Maheras
Hubert O. Hayworth
Michael R. Gulett
Assignee (at issue)
NCR Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.