Granted Patent
Utility
US 4,861,393 · App. 07/057,679
Semiconductor heterostructures having Ge.sub.x Si.sub.1-x layers on Si utilizing molecular beam epitaxy
Inventors:
John C. Bean, Leonard C. Feldman, Anthony T. Fiory
Patented Case
View Patent ↗
Granted: Aug 29, 1989
Filed: May 28, 1987
Inventors
John C. Bean
Leonard C. Feldman
Anthony T. Fiory
Assignee (at issue)
American Telephone and Telegraph Company, AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.