Granted Patent
Utility
US 4,861,421 · App. 07/201,007
Photochemical semiconductor etching
Inventor:
Rachelle J. Bienstock
Patented Case
View Patent ↗
Granted: Aug 29, 1989
Filed: Jun 1, 1988
Inventor
Rachelle J. Bienstock
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.