IP Library › Granted Patent US 4,863,102
Granted Patent Utility
US 4,863,102 · App. 07/272,281

CVD torch

Inventor: Philip S. Levin
Patented Case View Patent ↗
Granted: Sep 5, 1989 Filed: Dec 19, 1988
Inventor
Philip S. Levin
Assignee (at issue)
Spectrian Corporation

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Quick Facts
Patent No.
US 4,863,102
App. No.
07/272,281
Filed
1988-12-19
Granted
1989-09-05
Kind
A