Granted Patent
Utility
US 4,863,756 · App. 07/015,128
Method and equipment for coating substrates by means of a plasma discharge using a system of magnets to confine the plasma
Inventors:
Klaus Hartig, Anton Dietrich
Patented Case
View Patent ↗
Granted: Sep 5, 1989
Filed: Feb 2, 1987
Inventors
Klaus Hartig
Anton Dietrich
Assignee (at issue)
Leybold GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.