Granted Patent
Utility
US 4,863,834 · App. 07/079,661
Silicon-containing polymers as resists
Inventors:
Gregory L. Baker, Murrae J. S. Bowden, Antoni S. Gozdz, Cynthia F. Klausner
Patented Case
View Patent ↗
Granted: Sep 5, 1989
Filed: Jul 31, 1987
Inventors
Gregory L. Baker
Murrae J. S. Bowden
Antoni S. Gozdz
Cynthia F. Klausner
Assignee (at issue)
Bell Communications Research, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.