Granted Patent
Utility
US 4,868,133 · App. 07/324,858
Semiconductor wafer fabrication with improved control of internal gettering sites using RTA
Inventor:
Walter Huber
Patented Case
View Patent ↗
Granted: Sep 19, 1989
Filed: Mar 16, 1989
Inventor
Walter Huber
Assignee (at issue)
DNS Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.