IP Library Granted Patent US 4,874,014
Granted Patent Utility
US 4,874,014 · App. 07/135,939

Flow control manifold

Inventors: Robert W. Grant, William M. Jenson
Patented Case View Patent ↗
Granted: Oct 17, 1989 Filed: Dec 21, 1987
Inventors
Robert W. Grant
William M. Jenson
Assignee (at issue)
FSI INTERNATIONAL, INC.

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Quick Facts
Patent No.
US 4,874,014
App. No.
07/135,939
Filed
1987-12-21
Granted
1989-10-17
Kind
A