Granted Patent
Utility
US 4,874,460 · App. 07/272,017
Method and apparatus for modifying patterned film
Inventors:
Yoshitomo Nakagawa, Takehiro Yamaoka
Patented Case
View Patent ↗
Granted: Oct 17, 1989
Filed: Nov 16, 1988
Inventors
Yoshitomo Nakagawa
Takehiro Yamaoka
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.