Granted Patent
Utility
US 4,874,464 · App. 07/167,347
Process for epitaxial deposition of silicon
Inventors:
Dennis L. Goodwin, Mark Hawkins, Wayne Johnson, Aage Olsen, McDonald Robinson
Patented Case
View Patent ↗
Granted: Oct 17, 1989
Filed: Mar 14, 1988
Inventors
Dennis L. Goodwin
Mark Hawkins
Wayne Johnson
Aage Olsen
McDonald Robinson
Assignee (at issue)
Epsilon Limited Partnership
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.