Granted Patent
Utility
US 4,876,501 · App. 07/285,362
Method and apparatus for high accuracy measurment of VLSI components
Inventors:
Joseph L. Ardini, Jr., Brian Lefsky, Barbara J. Farr
Patented Case
View Patent ↗
Granted: Oct 24, 1989
Filed: Dec 14, 1988
Inventors
Joseph L. Ardini, Jr.
Brian Lefsky
Barbara J. Farr
Assignee (at issue)
Prime Computer, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.