Granted Patent
Utility
US 4,877,480 · App. 07/205,490
Lithographic technique using laser for fabrication of electronic components and the like
Inventor:
Shyam C. Das
Patented Case
View Patent ↗
Granted: Oct 31, 1989
Filed: Jun 6, 1988
Inventor
Shyam C. Das
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.