IP Library Granted Patent US 4,880,308
Granted Patent Utility
US 4,880,308 · App. 07/176,760

Aligning apparatus

Inventor: Hiroshi Shirasu
Patented Case View Patent ↗
Granted: Nov 14, 1989 Filed: Apr 1, 1988
Inventor
Hiroshi Shirasu
Assignee (at issue)
NIKON CORPORATION

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Quick Facts
Patent No.
US 4,880,308
App. No.
07/176,760
Filed
1988-04-01
Granted
1989-11-14
Kind
A