Granted Patent
Utility
US 4,881,010 · App. 07/148,209
Ion implantation method and apparatus
Inventor:
Neil Robert Jetter
Patented Case
View Patent ↗
Granted: Nov 14, 1989
Filed: Jan 22, 1988
Inventor
Neil Robert Jetter
Assignee (at issue)
Harris Semiconductor Patents, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.