Granted Patent
Utility
US 4,883,352 · App. 07/231,803
Deep-uv lithography
Inventor:
John H. Bruning
Patented Case
View Patent ↗
Granted: Nov 28, 1989
Filed: Aug 12, 1988
Inventor
John H. Bruning
Assignee (at issue)
American Telephone and Telegraph, Co.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.