IP Library Granted Patent US 4,885,231
Granted Patent Utility
US 4,885,231 · App. 07/191,186

Phase-shifted gratings by selective image reversal of photoresist

Inventor: Winston K. Chan
Patented Case View Patent ↗
Granted: Dec 5, 1989 Filed: May 6, 1988
Inventor
Winston K. Chan
Assignee (at issue)
Bell Communications Research, Inc.

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Quick Facts
Patent No.
US 4,885,231
App. No.
07/191,186
Filed
1988-05-06
Granted
1989-12-05
Kind
A