Granted Patent
Utility
US 4,886,728 · App. 07/141,128
Use of particular mixtures of ethyl lactate and methyl ethyl ketone to remove undesirable peripheral material (e.g. edge beads) from photoresist-coated substrates
Inventors:
Thomas E. Salamy, Marvin L. Love, Jr., Mark E. Towner
Patented Case
View Patent ↗
Granted: Dec 12, 1989
Filed: Jan 6, 1988
Inventors
Thomas E. Salamy
Marvin L. Love, Jr.
Mark E. Towner
Assignee (at issue)
Olin Hunt Specialty Products, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.