IP Library › Granted Patent US 4,886,954
Granted Patent Utility
US 4,886,954 · App. 07/181,787

Hot wall diffusion furnace and method for operating the furnace

Inventors: Chorng-Tao Yu, Michael A. Fisk, Alan Emami
Patented Case View Patent ↗
Granted: Dec 12, 1989 Filed: Apr 15, 1988
Inventors
Chorng-Tao Yu
Michael A. Fisk
Alan Emami
Assignee (at issue)
Thermco Systems, Inc.

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Quick Facts
Patent No.
US 4,886,954
App. No.
07/181,787
Filed
1988-04-15
Granted
1989-12-12
Kind
A