IP Library Granted Patent US 4,888,988
Granted Patent Utility
US 4,888,988 · App. 07/137,299

Silicon based mass airflow sensor and its fabrication method

Inventors: Ki Wook Lee, Il Hyun Choi
Patented Case View Patent ↗
Granted: Dec 26, 1989 Filed: Dec 23, 1987
Inventors
Ki Wook Lee
Il Hyun Choi
Assignee (at issue)
Siemens-Bendix Automotive Electronics L.P.

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Quick Facts
Patent No.
US 4,888,988
App. No.
07/137,299
Filed
1987-12-23
Granted
1989-12-26
Kind
A