Granted Patent
Utility
US 4,889,609 · App. 07/240,861
Continuous dry etching system
Inventor:
Vincent D. Cannella
Patented Case
View Patent ↗
Granted: Dec 26, 1989
Filed: Sep 6, 1988
Inventor
Vincent D. Cannella
Assignee (at issue)
Ovonic Imaging Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.