IP Library Granted Patent US 4,890,574
Granted Patent Utility
US 4,890,574 · App. 07/206,400

Internal reactor for chemical vapor deposition

Inventors: Vinod K. Sarin, Charles D'Angelo, III, Helen E. Rebenne
Patented Case View Patent ↗
Granted: Jan 2, 1990 Filed: Jun 14, 1988
Inventors
Vinod K. Sarin
Charles D'Angelo, III
Helen E. Rebenne
Assignee (at issue)
GTE Laboratories Incorporated

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Quick Facts
Patent No.
US 4,890,574
App. No.
07/206,400
Filed
1988-06-14
Granted
1990-01-02
Kind
A