IP Library › Granted Patent US 4,897,325
Granted Patent Utility
US 4,897,325 · App. 07/275,192

Contact lithographic fabrication of patterns on large optics

Inventors: Prasad R. Akkapeddi, Robert E. Hufnagel
Patented Case View Patent ↗
Granted: Jan 30, 1990 Filed: Nov 23, 1988
Inventors
Prasad R. Akkapeddi
Robert E. Hufnagel
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,897,325
App. No.
07/275,192
Filed
1988-11-23
Granted
1990-01-30
Kind
A