IP Library Granted Patent US 4,897,537
Granted Patent Utility
US 4,897,537 · App. 07/173,416

Automatic focus adjusting system of microscope employed in surface inspection apparatus

Inventors: Seiichi Miyamoto, Yo Tajima, Masaru Maruki, Masaru Hanatani
Patented Case View Patent ↗
Granted: Jan 30, 1990 Filed: Mar 25, 1988
Inventors
Seiichi Miyamoto
Yo Tajima
Masaru Maruki
Masaru Hanatani
Assignee (at issue)
Kanzaki Paper Manufacturing Co., Ltd.

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Quick Facts
Patent No.
US 4,897,537
App. No.
07/173,416
Filed
1988-03-25
Granted
1990-01-30
Kind
A