Granted Patent
Utility
US 4,897,966 · App. 07/087,167
Polishing apparatus
Inventor:
Yutaka Takahashi
Patented Case
View Patent ↗
Granted: Feb 6, 1990
Filed: Aug 18, 1987
Inventor
Yutaka Takahashi
Assignees (at issue)
Japan Silicon Co., Ltd.
Mitsubishi Kinzoku Kabushiki Kaisha
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.