Granted Patent
Utility
US 4,899,059 · App. 07/366,202
Disk scanning apparatus for batch ion implanters
Inventors:
Avrum Freytsis, Richard J. Hertel, Eric L. Mears
Patented Case
View Patent ↗
Granted: Feb 6, 1990
Filed: Jun 9, 1989
Inventors
Avrum Freytsis
Richard J. Hertel
Eric L. Mears
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.