IP Library › Granted Patent US 4,902,530
Granted Patent Utility
US 4,902,530 · App. 07/157,922

Method of correcting a pattern film

Inventors: Anto Yasaka, Yoshitomo Nakagawa, Mitsuyoshi Sato
Patented Case View Patent ↗
Granted: Feb 20, 1990 Filed: Feb 19, 1988
Inventors
Anto Yasaka
Yoshitomo Nakagawa
Mitsuyoshi Sato
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 4,902,530
App. No.
07/157,922
Filed
1988-02-19
Granted
1990-02-20
Kind
A