IP Library › Granted Patent US 4,902,898
Granted Patent Utility
US 4,902,898 · App. 07/186,510

Wand optics column and associated array wand and charged particle source

Inventors: Gary W. Jones, Susan K. Schwartz Jones
Patented Case View Patent ↗
Granted: Feb 20, 1990 Filed: Apr 26, 1988
Inventors
Gary W. Jones
Susan K. Schwartz Jones
Assignee (at issue)
Microelectronics Center of North Carolina

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Quick Facts
Patent No.
US 4,902,898
App. No.
07/186,510
Filed
1988-04-26
Granted
1990-02-20
Kind
A