IP Library › Granted Patent US 4,904,616
Granted Patent Utility
US 4,904,616 · App. 07/224,089

Method of depositing arsine, antimony and phosphine substitutes

Inventors: David A. Bohling, Gregory T. Muhr, David A. Roberts
Patented Case View Patent ↗
Granted: Feb 27, 1990 Filed: Jul 25, 1988
Inventors
David A. Bohling
Gregory T. Muhr
David A. Roberts
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 4,904,616
App. No.
07/224,089
Filed
1988-07-25
Granted
1990-02-27
Kind
A