Granted Patent
Utility
US 4,906,844 · App. 07/231,795
Phase sensitive optical monitor for thin film deposition
Inventor:
Randolph L. Hall
Patented Case
View Patent ↗
Granted: Mar 6, 1990
Filed: Aug 12, 1988
Inventor
Randolph L. Hall
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.